Particle or gel-control screening
Provide the resin and solvent family, viscosity, defect mode, dispense position, flow and allowable pressure drop before comparing membrane options.
Zhongfu Semiconductor · own-brand liquid filter
LTD1 high-cleanliness liquid filters.
HDPE, nylon and PTFE membrane options for initial screening in photoresist, bottom anti-reflective coating (BARC), TMAH developer, compatible solvent and DIW filtration positions.
HDPE50 nm to 1 nm0.24 m² membrane area
Nylon50 nm to 5 nm0.18 m² membrane area
PTFE0.45 µm to 10 nm0.24 m² membrane area
Operating envelope0.39 MPa at 24°CMaximum pressure
Zhongfu-branded product
Screen the membrane against the actual chemistry.
The LTD1 format combines a PP housing, end caps and cage with HDPE support and an NPT connection. The membrane option is selected separately: HDPE, nylon or PTFE.
Photoresist, BARC, developer, solvent and DIW are application directions—not a statement that every membrane suits every formulation.
For TMAH, confirm concentration and temperature, membrane material, extractables or precipitation concerns, wetting behaviour, equipment conditions and the qualification method.
Published specifications
LTD1 technical selection table.
Review the available configurations and operating limits below, then confirm the selected membrane against the application.
| Item | Published value |
|---|---|
| Application direction | Photoresist, BARC, TMAH developer, related solvents and DIW filtration |
| HDPE membrane options | 50 / 30 / 10 / 5 / 2 / 1 nm · 0.24 m² |
| Nylon membrane options | 50 / 20 / 10 / 5 nm · 0.18 m² |
| PTFE membrane options | 0.45 / 0.2 / 0.1 µm and 50 / 30 / 20 / 10 nm · 0.24 m² |
| Structure | PP housing, end caps and cage · HDPE support |
| Connection | NPT |
| Drawing dimensions | 118 × 72 mm |
| Maximum pressure | 0.39 MPa at 24°C |
| Maximum application temperature | 24°C |
| Maximum forward differential pressure | 0.28 MPa at 24°C |
Confirm the membrane, chemical compatibility, wetting requirements and operating conditions for the selected configuration.
Application boundaries
Use the chemistry and failure mode to narrow the option.
A labelled grade does not replace a documented compatibility and qualification plan.
Concentration and material review
Confirm TMAH concentration, temperature, contact time, membrane compatibility, extractables or precipitation risk, wetting and the equipment envelope.
Exact media and operating conditions
Identify the chemical or SDS, temperature, pressure, flow, NPT interface and cleanliness target. The application label alone is not an approval.
Dimensional reference
Use the drawing for equipment-envelope screening.
The supplied drawing shows 118 mm × 72 mm. Confirm the actual connection, tubing layout, bracket and service clearance before release.
CHEMISTRYChemical name or SDS, blend and concentration
HYDRAULICSFlow, pressure and allowable pressure drop
INTERFACENPT requirement, equipment position and available space
QUALIFICATIONParticle, gel, extractables, wetting or defect acceptance method
LTD1 selection FAQ
Can every LTD1 membrane option be used with TMAH developer?
No blanket compatibility statement is made. Confirm TMAH concentration and temperature, membrane material, extractables, wetting behaviour, equipment conditions and the planned qualification method.
Do the nm and µm labels prove absolute retention?
No. The listed grades identify available configurations and do not by themselves establish absolute retention performance. Confirm the test method and validation data for the selected configuration.
What should be sent for an application review?
Send the chemical or SDS, concentration, temperature, flow, allowable pressure drop, process position, NPT interface, equipment envelope and the particle, gel, extractables or wetting qualification target.
Review an LTD1 filter position.
Send the formulation or SDS, operating conditions, interface and validation target.