Made in China · 12 Zhongfu product families

Engineered liquid filters for critical process chemistry.

China-made PTFE, PFA, HDPE and nylon filter formats for wet-process chemicals, photoresist, developer, electronic chemical production, CDS, point-of-use positions and selected CMP slurry duties.

Complete liquid portfolio map

Our engineered range, connected to complementary routes.

The detailed specifications below apply only to the twelve Zhongfu engineered families. Complementary sourced routes are shown separately and confirmed per quotation.

Liquid applications mapped to Zhongfu engineered and quotation-confirmed routes
Application	Zhongfu engineered · Made in China	Complementary quotation-confirmed routes
Electronic chemicals / CDS	All-fluoropolymer and semi-fluoropolymer cartridges	Pleated PP, PES and modified-wettability routes
Photoresist / lithography	HDPE, nylon and compact 0.5 L / 1 L POU filters	UPE, capsule, laboratory and complementary compact formats
CMP slurry	Hydrophilic nylon cartridge	Graded-depth PP and integrated PP routes
UPW / rinse water	Application review against compatible Zhongfu families	PP, hydrophilic PES and capsule routes

The specifications below are screening data, not a blanket compatibility statement. Confirm the chemical and SDS, process position, flow, pressure, temperature, fitting and validation method before use.

Need an all-fluoropolymer filter? Open the focused PTFE/PFA selection guide →

All-fluoropolymer high-retention PTFE cartridge filter

Family 01 · Critical chemicals

All-fluoropolymer high-retention cartridge

PTFE membrane with PFA cage, end caps and support for initial screening in compatible electronic chemical production, CDS and selected wet etch or clean duties.

Membrane / structure	PTFE membrane · PFA cage, end caps and support
Published grade options	0.45 µm · 0.2 µm · 0.1 µm · 50 nm · 30 nm · 20 nm · 10 nm
Lengths / outside diameter	10 or 20 inch · 70 or 83 mm
Membrane area	10 inch: 1.3 or 2.2 m² · 20 inch: 2.6 or 4.4 m²
Connection / seals	AS568-222 · FEP or FFKM
Maximum temperature	180°C
Maximum forward differential pressure	0.59 MPa at 50°C

All-fluoropolymer high-flow PTFE cartridge filter

Family 02 · Flow / pressure-loss review

All-fluoropolymer high-flow cartridge

High-flow PTFE membrane in a PFA structure for compatible critical chemicals where flow, pressure loss and the validation target must be evaluated together.

Membrane / structure	PTFE membrane · PFA cage, end caps and support
Published grade options	0.2 µm · 0.1 µm · 50 nm · 30 nm · 20 nm · 15 nm · 10 nm
Lengths / outside diameter	10 or 20 inch · 70 or 83 mm
Membrane area	10 inch: 1.2 or 2.1 m² · 20 inch: 2.4 or 4.2 m²
Connection / seals	AS568-222 · FEP or FFKM
Maximum temperature	170°C
Maximum forward differential pressure	0.59 MPa at 50°C

All-fluoropolymer ultra-high-flow PTFE cartridge filter

Family 03 · Capacity evaluation

All-fluoropolymer ultra-high-flow cartridge

Large-area, high-flow PTFE membrane in an all-PFA support structure for capacity and cartridge-count evaluation in compatible electronic chemical and CDS applications.

Membrane / structure	High-flow PTFE membrane · PFA cage, end caps and support
Published grade options	50 nm · 30 nm · 20 nm · 15 nm · 10 nm
Lengths / outside diameter	10 or 20 inch · 70 mm
Membrane area	50/30 nm: 1.2 or 2.4 m² · 20/15/10 nm: 1.3 or 2.6 m²
Connection / seals	AS568-222 · FEP or FFKM
Maximum temperature	180°C
Maximum forward differential pressure	0.4 MPa at 25°C

Family 04 · Wet tools

Integrated all-fluoropolymer wet-process filter

PTFE membrane with a PFA housing, cage, end caps and support to limit chemical exposure during change-out. Intended for selected single-wafer and batch wet-process equipment, including SC-1, SC-2, SPM and phosphoric-acid positions after full compatibility review.

Membrane / structure	PTFE membrane · all-PFA housing and internal support
Retention options	0.2 µm · 0.1 µm · 50 nm · 30 nm · 20 nm · 15 nm · 10 nm
Membrane area	2.1 m²
Inlet / outlet	T-type integrated flow path
Maximum temperature	185°C
Maximum operating pressure	0.59 MPa at 50°C

Semi-fluoropolymer high-retention PTFE cartridge filter

Family 05 · Performance / cost balance

Semi-fluoropolymer high-retention cartridge

PTFE membrane with a PP or HDPE cage and HDPE support. Designed for compatible electronic chemicals, CDS and wet-process duties that require high retention and cleanliness with a cost-balanced structure.

Membrane / structure	PTFE membrane · PP or HDPE cage/end caps · HDPE support
Retention options	0.45 µm · 0.2 µm · 0.1 µm · 50 nm · 30 nm · 20 nm · 10 nm
Length / outside diameter	275 mm (10 inch) or 518 mm (20 inch) · 70 mm
Membrane area	1.2 m² standard configuration
Connection / seals	AS568-222 · FEP or FFKM
Maximum temperature	60°C
Maximum forward differential pressure	0.5 MPa below 60°C

Semi-fluoropolymer high-flow PTFE cartridge filter

Family 06 · High flow

Semi-fluoropolymer high-flow cartridge

A higher-flow PTFE membrane with PP or HDPE cage and HDPE support. Intended for compatible chemicals where lower pressure loss and longer service life are priority selection factors.

Membrane / structure	High-flow PTFE membrane · PP or HDPE cage/end caps · HDPE support
Retention options	0.45 µm · 0.2 µm · 0.1 µm · 50 nm · 30 nm · 20 nm · 10 nm
Length / outside diameter	275 mm (10 inch) or 518 mm (20 inch) · 70 mm
Membrane area	1.2 m² standard configuration
Connection / seals	AS568-222 · FEP or FFKM
Maximum temperature	60°C
Maximum forward differential pressure	0.5 MPa below 60°C

Semi-fluoropolymer ultra-high-flow PTFE cartridge filter

Family 07 · Higher throughput

Semi-fluoropolymer ultra-high-flow cartridge

High-flow PTFE membrane with HDPE cage, end caps and support for compatible electronic chemical and CDS applications requiring higher capacity or fewer cartridge positions.

Membrane / structure	High-flow PTFE membrane · HDPE cage, end caps and support
Retention options	50 nm · 30 nm · 20 nm · 15 nm · 10 nm
Length / outside diameter	10 or 20 inch · 70 mm
Membrane area	50/30 nm: 0.9 or 1.8 m² · 20/15/10 nm: 1.2 or 2.4 m²
Connection / seals	AS568-222 · FEP or FFKM
Maximum temperature	60°C
Maximum forward differential pressure	0.34 MPa at 25°C

HDPE lithography and photoresist filter cartridge

Family 08 · Photoresist

HDPE lithography cartridge

HDPE membrane, cage, end caps and support for initial screening in photoresist and compatible organic-solvent filtration, with multiple published grade and flow configurations.

Membrane / structure	HDPE membrane · HDPE cage, end caps and support
Published grade options	50 nm · 30 nm · 10 nm · 5 nm · 2 nm · 1 nm · sub-1 nm selection
Length / outside diameter	270 mm (10 inch) or 521 mm (20 inch) · 70 mm
Membrane area	1.3 m²
Connection / seals	AS568-222 · FEP or FFKM
Maximum temperature	50°C
Maximum forward differential pressure	0.35 MPa at 40°C

Nanometre labels identify available product selections. Do not interpret them as guaranteed removal efficiency without the corresponding test method and qualification data.

Nylon lithography and solvent filter cartridge

Family 09 · Gel retention

Nylon lithography cartridge

Nylon membrane with HDPE cage, end caps and support for selected photoresist and organic-solvent applications. Nylon can provide useful adsorption behaviour for gel-like contaminants where chemistry compatibility is confirmed.

Membrane / structure	Nylon membrane · HDPE cage, end caps and support
Retention options	50 nm · 20 nm · 10 nm · 5 nm
Length / outside diameter	270 mm (10 inch) or 521 mm (20 inch) · 70 mm
Membrane area	0.85 m²
Connection / seals	AS568-222 · FEP or FFKM
Maximum temperature	50°C
Maximum forward differential pressure	0.35 MPa at 40°C

Compact 0.5 litre lithography point-of-use filter

Family 10 · Compact POU

Compact 0.5 L point-of-use filter

Compact HDPE housing and support with HDPE or nylon membrane selections for developer, DI water and compatible solvent duties at tool-side positions.

Membrane options	HDPE: 50, 30, 10, 5, 2, 1 and sub-1 nm selections · Nylon: 50, 20, 10 and 5 nm
Membrane area	HDPE: 0.48–0.50 m² by selection · Nylon: 0.36 m²
Structure / seal	HDPE cage, end caps, housing and support · FFKM seal
Maximum operating pressure	0.39 MPa at 24°C
Maximum temperature	24°C
Maximum forward differential pressure	0.28 MPa at 24°C

Compact 1 litre lithography point-of-use filter

Family 11 · Tool-side POU

Compact 1 L point-of-use filter

PP housing and cage with HDPE support, offered with HDPE, nylon or PTFE membrane selections for developer, DI water, compatible solvents and lithography chemicals.

Membrane options	HDPE: 50, 30, 10, 5, 2 and 1 nm · Nylon: 50, 20, 10 and 5 nm · PTFE: 0.45, 0.2, 0.1 µm, 50, 30, 20 and 10 nm
Membrane area	HDPE / PTFE: 0.24 m² · Nylon: 0.18 m²
Structure / connection	PP cage, end caps and housing · HDPE support · NPT connection
Maximum operating pressure	0.39 MPa at 24°C
Maximum temperature	24°C
Maximum forward differential pressure	0.28 MPa at 24°C

Hydrophilic nylon CMP slurry cartridge filter

Family 12 · CMP materials

Hydrophilic nylon CMP cartridge

Hydrophilic nylon membrane with PP cage, end caps and support for selected ceria slurry production filtration, DI water and compatible organic-solvent duties.

Membrane / structure	Hydrophilic nylon membrane · PP cage, end caps and support
Retention options	0.45 µm · 0.2 µm · 0.1 µm
Length / outside diameter	10 or 20 inch · 70 mm
Membrane area	10 inch: 0.45 m² · 20 inch: 0.9 m²
Connection / seal	AS568-222 · EPDM
Maximum temperature	70°C
Maximum forward differential pressure	0.5 MPa at 50°C

Information required

What to send for a reliable selection.

A complete process condition allows the engineering team to rule out incompatible constructions before discussing samples and commercial terms.

Chemistry

Chemical name and SDS

Include concentration, blend, dissolved gas or oxidiser, and any temperature-dependent compatibility concern.

Hydraulics

Flow and allowable pressure drop

Include clean-flow target, viscosity, operating pressure, recirculation duty and change-out threshold.

Hardware

Position, fitting and housing

Identify bulk, final, recirculation or POU position, plus current housing and connection details.

Qualification

Retention and cleanliness method

State the particle challenge, extractables, metal-ion, gel or defect-reduction acceptance criteria.

Need the correct construction, not just the nearest pore label?

Use the qualification checklist or second-source process to define the comparison basis, then send the chemical, process position and operating conditions.

Second-source process Request application review