Control oversize material without damaging the useful distribution
CMP slurry filtration must balance agglomerate control against removal or alteration of the intended abrasive population. Slurry chemistry, solids loading, particle-size distribution, viscosity, shear and recirculation history belong in the selection review.
Hydrophilic nylon cartridge family
The Zhongfu CMP nylon family uses a hydrophilic nylon membrane with PP cage, end caps and support. Screening options include 0.45 µm, 0.2 µm and 0.1 µm in 10- and 20-inch formats, with EPDM seals, a published maximum temperature of 70°C and maximum forward differential pressure of 0.5 MPa at 50°C.
Compare Zhongfu nylon with complementary graded-depth PP and integrated PP routes →
Validate with the real slurry
- Compare incoming and filtered particle-size distribution.
- Track clean and loaded pressure drop at process flow.
- Review slurry stability, solids loss and defect-relevant agglomerates.
- Use representative recirculation, temperature and hold time.
Data to include in an RFQ
Provide slurry type, abrasive, solids loading, viscosity, particle-size distribution, batch or recirculation duty, flow, pressure, temperature, current filter, acceptance criteria, quantity and destination.
This page addresses selected production-filtration duties. It does not establish suitability for every CMP formulation or direct wafer-tool application.